660-063437-010 射频发生器

Description

660-063437-010 射频发生器

AE APEX 2013 AE 射频电源 APEX 2013 13.56MHz 2000W射频发生器功率密度高，能够实现紧凑型安装。在空间有限但性能至关重要的情况下，简化版APEX Series 射频发生器能为客户提供值得信赖的各种安装选项和功率。

AE APEX Series 射频发生器可以适配腔室、机架或框架等安装选项，在提供方便的同时还可以降低功率损耗。全系列RF Generator 有优秀的电弧管理能力，在13.56Mhz频率下，可选择1.5KW~10KW不同输出功率的设备。

技术参数：

Power Level : 1.5, 3, and 5.5 kW

Frequencies : 13 MHz

Available Interfaces : RS-232, 25-pin analog, Ethernet, DeviceNet

AC Input : 208 VAC

Line Frequency : 50/60 Hz

Cooling : Water

Ambient Air Temperature Range : +5 to +40°C

Cooling Water Temperature Range : +5 to +35°C

Advanced Features : Pulsing, CEX

优点：

1.灵活性提高，可直接集成工艺机台

2.等离子操作稳定化

3.提高快速电弧管理的良品率

4.AE 射频电源 APEX 2013 13.56MHz 2000W易于根据客户的工艺要求进行定制和配置

特点：

1.流线型设计，实现大功率密度

2.可选腔室安装、工具框架安装、机架安装和鞋盒式安装

3.宽带控制回路

4.可选脉冲控制

5.高速电弧管理

660-063437-010

660-063437-010 射频发生器

AE APEX 2013 AE RF Power Supply APEX 2013 13.56MHz 2000W RF generator has high power density and enables compact installation. In situations where space is limited but performance is critical, the simplified APEX Series RF generator offers customers a variety of installation options and power they can trust.

The AE APEX Series RF generator can be adapted to mounting options such as chambers, racks or frames, providing convenience while reducing power loss. The full range of RF generators has excellent arc management capabilities, and can choose 1.5KW~10KW different output power equipment at 13.56Mhz frequency.

Technical parameters:

Power Level: 1.5, 3, and 5.5 kW

Frequencies : 13 MHz

Available Interfaces : RS-232, 25-pin analog, Ethernet, DeviceNet

AC Input : 208 VAC

Line Frequency : 50/60 Hz

Cooling : Water

Ambient Air Temperature Range : +5 to +40°C

Cooling Water Temperature Range : +5 to +35°C

Advanced Features : Pulsing, CEX

Advantages:

1. Improved flexibility, can directly integrate the process machine

2. Plasma operation stabilization

3. Improve the yield of rapid arc management

4.AE RF Power APEX 2013 13.56MHz 2000W is easy to customize and configure according to customer’s process requirements

Features:

1. Streamline design to achieve high power density

2. Optional chamber installation, tool frame installation, rack installation and shoebox installation

3. Broadband control loop

4. Optional pulse control

5. High-speed arc management